Physical and chemical properties of silicon carbide
processing technology research:
The hardness of SiC is second only to diamond, and it can be used as abrasive for grinding tools such as grinding wheels. Therefore, it is mainly used for grinding, grinding and polishing with diamond grinding wheel. Among them, diamond grinding wheel has the highest efficiency and is important for processing SiC. means. However, SiC materials not only have high hardness, but also high brittleness and low fracture toughness, which cause brittle fracture of materials during grinding process, leaving surface fracture layer on the surface of the material and causing serious surface and subsurface damage. , affecting the processing accuracy. Therefore, in-depth study of SiC grinding mechanism and subsurface damage is of great significance for improving the efficiency and surface quality of SiC grinding.




